Skip to content. | Skip to navigation

Personal tools

The Global
Information Hub for
Lighting Technologies
and Design

Sections
Home > Components & Tools > Engineering, Production & Testing > AIXTRON’s New Generation AIX G5 System Achieves Aggressive Productivity Targets
Products, Materials + Tools | Feb 23, 2010

AIXTRON’s New Generation AIX G5 System Achieves Aggressive Productivity Targets

AIXTRON AG today announced that its next generation MOCVD Platform AIX G5 HT has demonstrated high quality GaN deposition at very high growth rates and high pressure above 600mbar and superior GaN/InGaN uniformities.

The epitaxial runs were performed at Epistar Corporation, located in the Hsinchu Science-based Industrial Park, Taiwan consecutively without reactor baking or swapping of any parts. The MOCVD reactor is now being transferred into mass production.
 
The Next Generation Platform AIX G5 HT provides the largest wafer capacity (56x2” / 14x4” / 8x6”) and comes with revolutionary new reactor design features that allow high growth rates and consecutive runs without baking or swapping of parts. In total, this results in a more than doubled high quality throughput compared to the previous generation.
 
The new reactor design provides highest process flexibility combined with superior process stability. AIX G5 HT systems provide fastest time to production with highest reproducibility from tool-to-tool, which enables a faster production ramp up as compared to any other reactor, with easy copy-and-paste process transfer, a key factor in a rapidly booming market with limited numbers of available process experts.
 
Dr. Ming-Jiunn Jou, President of Epistar, comments: “AIXTRON was committed to the challenging targets for the new reactor when we started our cooperation. Now we are amazed how quickly AIXTRON has met its commitments. Furthermore, the uniformities seen so far have given us confidence to significantly improve our production yield on this new MOCVD reactor. We are now very keen to bring this new tool into production and to benefit from its improvements.”
 
Gerd Strauch, Vice President Corporate Product Design & Engineering, and responsible for Planetary Reactor Development at AIXTRON AG comments: “I am very pleased to see this fast progress at Epistar, as it is in accordance with our expectations. It confirms the excellent target-oriented design of our new reactor chamber, and it is a proof of our advanced CFD modelling and system qualification at our own laboratory. We have successfully transferred the epitaxial growth performance from our laboratory 1:1 to the system at Epistar’s site.”

FEATURED

When Very High Light Output and Efficiency are Required for Demanding Applications, New LUXEON 7070 Checks All the Boxes

When Very High Light Output and Efficiency are Required for Demanding Applications, New LUXEON 7070 Checks All the Boxes More lumens, higher efficacy, and lower system costs are the driving forces behind new designs for a broad range of indoor and outdoor high light output applications. Lumileds new LUXEON 7070, introduced today, is designed to outperform similar lead-frame and ceramic high-power solutions with ... Read more »

FEATURED

NEW Extreme High Power LEDs Deliver Best Optical Performance

NEW Extreme High Power LEDs Deliver Best Optical Performance New XLamp® XHP70.3 LEDs deliver the best lumen density, reliability and optical control available in a 7x7 mm footprint.   Read more »

FEATURED

Edison Opto UVA + W & UVC Series Customize Design Solution

Edison Opto UVA + W & UVC Series Customize Design Solution Edison Opto offers customized UVA + White and UVC solutions for continuous disinfection to reduce bacteria and airborne viruses. In the wake of the global outbreak of COVID-19, the people’s need for anti-epidemic, sterilization, and anti-virus products has escalated, ranging from portable ... Read more »

EDITORIAL

deLIGHTed Talks: Good Light – Good Life in Wintertime, November 3, 2021

deLIGHTed Talks: Good Light – Good Life in Wintertime,  November 3, 2021 The Good Light Group, together with the Society for Light Treatment and Biological Rhythms (SLTBR), the Daylight Academy (DLA), the International Association of Lighting Designers (IALD), and Luger Research (LR), are organizing and presenting the “Good Light – Good Life” lectures. The webinar ... Read more »

page_peel